JPH06742Y2 - 半導体圧力変換器 - Google Patents
半導体圧力変換器Info
- Publication number
- JPH06742Y2 JPH06742Y2 JP1987015185U JP1518587U JPH06742Y2 JP H06742 Y2 JPH06742 Y2 JP H06742Y2 JP 1987015185 U JP1987015185 U JP 1987015185U JP 1518587 U JP1518587 U JP 1518587U JP H06742 Y2 JPH06742 Y2 JP H06742Y2
- Authority
- JP
- Japan
- Prior art keywords
- output voltage
- longitudinal direction
- shear
- gauge
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987015185U JPH06742Y2 (ja) | 1987-02-04 | 1987-02-04 | 半導体圧力変換器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987015185U JPH06742Y2 (ja) | 1987-02-04 | 1987-02-04 | 半導体圧力変換器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63124638U JPS63124638U (en]) | 1988-08-15 |
JPH06742Y2 true JPH06742Y2 (ja) | 1994-01-05 |
Family
ID=30805882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987015185U Expired - Lifetime JPH06742Y2 (ja) | 1987-02-04 | 1987-02-04 | 半導体圧力変換器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06742Y2 (en]) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5925393B2 (ja) * | 1977-03-17 | 1984-06-16 | 株式会社日立製作所 | 半導体ひずみゲ−ジ形ダイアフラム |
JPS5924553B2 (ja) * | 1977-05-13 | 1984-06-09 | 株式会社日立製作所 | 圧力センサ |
JPS5730922A (en) * | 1980-08-01 | 1982-02-19 | Hitachi Ltd | Sensor for pressure difference and pressure |
JPS61295672A (ja) * | 1985-06-25 | 1986-12-26 | Yokogawa Electric Corp | 半導体圧力センサ及び圧力測定装置 |
-
1987
- 1987-02-04 JP JP1987015185U patent/JPH06742Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63124638U (en]) | 1988-08-15 |
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